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Wet bench (Wet Chemical Equipment)
Spin Cleaner Spin Dryer Wet Bench
Wet bench (Wet Chemical Equipment)
Product Overview
Wet bench is often utilized in developing, etching, stripping and cleaning process.
Media-01 (Part I)
Media-01 (Part II)
Media-01 (part III)
Media-02
Wet Chemical Equipment
Applicable Measurement 2 - 12 Wafer
Product Type Wet Bench or Wet Station
Applicable Industry
  • Application of semiconductor processing industry
  • TFT-LCD (thin film transistor liquid crystal display)
  • Micro electromechanical
  • Touch Panel
  • Solar energy
  • Light Emitting Diode
  • Precision thin film optics
  • Diodes
  • Chemical Research & Development units
    		•
    Application of Process
  • Developing Process
  • Etching Process
  • Stripping and Cleaning Process
  • Unwaxed Process
  • Precision Cleaning Operation
  • Masking and Stripping Process
  • Patterned Sapphire Substrate-High-temperature manufacturing operations (Sub-micron (nano) and Wet Etching Process
    		•
    Equipment Type
  • Auto
  • Semi-Auto
  • Manual
    • Available Option
    • Class 100 or 1000
    • The operation area environment controls (Class 100 or 1000)
    • Data Logic, conversion, storage, input and output integrated
    • Chemical Supply System
    • Fire Prevention System (CO2 / IR)
    • Programmable Automation system (PLC / PC Base / PAC)
    • barcode reader
    • Auto Cover
    • Load/Unload
    Product Features
    • Chemical piping system, Materials Control Valve, use quality motor parts.
    • Robotic horizontal and vertical strokeˇG

      • 1 before and after the displacement of one to one
      2steering, front and rear, left and right, up and down displacement of a pair of four
      3Tunnel Type, left and right, Up and down, one to many continuous transmission displacement
      4Full rotary, front and back, Upper and lower displacement one to many troughs and so on, Custom engineered to meet specific application requirements.
    • With modular design, ease of maintenance and service.
    • System unit with high stability, high positioning, with adjustable height.
    • Multiple securities for Acidic liquid gas operation area, Protection of operators working environment and personal safety.
    • Flexible disposition scheme for QDR.
    • Modular piping system configuration, to build security storage quantity in non-period plant inventory.
    • Good Custom Design Capabilities, Product design is highly adaptable to fit in customized environment according to the actual needs.
    • Can be combined with the client protocol, data storage, CIM System, establish Storage management of data analysis.
     

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    Address :4F., No.101, Sec. 3, Nanjing East Road., Jhongshan District, Taipei City, Taiwan (R.O.C.)
    Phone : +886-2-82572175 Fax : : +886-2-82573663 Mobile : +886-0915-072-563
    24Hr Service Hotline: +886-915-072-563

    SRT specializes in multi-spin coater, wafer-related manufacturing equipments such as spin cleaner, spin dryer, die flipper, wafer expander, and wafer mounter

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