Product Overview
Professional spin coater with housing of SUS 304 stainless steel or solid polypropylene housing and frame of Aluminum-Extrusion frames or SUS 304 square steel.
Coater dimension: LxDxH = the actual product design
Equipment housing: SUS 304 stainless steel or solid polypropylene housing
Equipment frame: Aluminum-Extrusion frames or SUS 304 square steel
Operation viewing: Viewing window made of transparent PVC or glass
Wiring: Back- and bottom- hidden wiring
Ventilation: Indirect Ventilation System
Coater Stand: Height adjustable stand with position lock feature
Lid: Air-valve driven with open/close alert design
Application
8 inch or 12 inch Wafer / Glass
Specialty
Build-to-order available
Operation Procedure
Open lid > manual substrate placement > manual position adjustment > vacuuming > substrate attached to rotary plate > close lid > chemical release > power on > low speed > medium speed > high speed > power off > un-vacuuming > open lid > manual product retrieval
SRT specializes in multi-spin coater, wafer-related manufacturing equipments such as spin cleaner, spin dryer, die flipper, wafer expander, and wafer mounter
