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Product Overview
This professional multi-slot spin coater best fits for 2"-6" waffer, 6" solar cell (wafer), and
other semiconductor-related substrates.
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Multi-Slot Spin Coater
| Application |
- 2" - 6" Wafer
- 6" solar cell(wafer)
- Other semiconductor-related substrates
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| Operation Mode |
Semi-Auto/ Manual |
| Product type |
Station-size: 2-, 3-, 4- systems |
(PS.Different Model)
Multi-Slot Spin Coater
| Product: |
Station-sized Multi-spin coater |
Housing: |
SUS or PP casing. |
Operator Space: |
SUS 304 stainless steel / solid polypropylene housing |
Frame: |
Aluminum-Extrusion frames/SUS 304 square steel. |
Lid: |
Made of polypropylene. Dimension: 300mm in diameter/150mm in height. Indirect vacuuming design |
Coating Size: |
2 inch - 4 inch Wafer |
Coater Stand: |
Wheels with anchor and height adjustment |
Wiring: |
Back- and Bottom- Hidden |
Sash: |
Transparent PVC sash with full-length vertical adjustment; effective protection from inhalation of hazardous vapors such as acidic gas |
Ventilation: |
Back-end ventilation system with upward-airway piping (8-inches pipe width x 1 Damper). |
Lighting: |
Top 20W florescent light within equipment |
Rotary Scheme: |
Japan SANYO DENKI or MITSUBISHI AC Servo Motor with Indirect Lever Design. |
RPM setting: |
3 to 7 level of speed according to customer's need |
setup: |
Digital input. |
input: |
Chinese human-machine interface with color screen for direct input |
Operating System: |
PLC/PC Base/PAC. |
Memory Preset: |
10 memory settings according to customer's needs |
Emergency Shut-Off: |
Yes (E.M.O switch) |
Power: |
3 x 220V 20A |
Operation parameter: |
Openly modifiable |
Vacuum Sensor: |
Vacuum SENSOR. |
Safety Feature: |
Leakage Circuit Breaker and emergency stop button |
Panel: |
On/Off Vacuum Button |
Options: |
- Center Positioning Control
- Wafer Automatic Feeder
- Wafer Cleaner
- Robotic Arm
- Weight Transducer
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