Multi-Slot Spin Coater
Spin Cleaner
Spin Dryer
Wet Bench
Spin Coater
SRT specializes in professional 2"-6" and 6"-12"spin coater,multi-spin coater,wafer-related manufacturing equipments such as spin cleaner,spin dryer,die flipper,wafer expander, and wafer mounter.
Product Overview
Multi-Slot Spin Coater
Application
2" - 6" Wafer
6" solar cell(wafer)
Other semiconductor-related substrates
Operation Mode
Semi-Auto/ Manual
Product type
Station-size: 2-, 3-, 4- systems
(PS.Different Model)
Multi-Slot Spin Coater
Product:
Station-sized Multi-spin coater
Housing:
SUS or PP casing.
Operator Space:
SUS 304 stainless steel / solid polypropylene housing
Frame:
Aluminum-Extrusion frames/SUS 304 square steel.
Lid:
Made of polypropylene. Dimension: 300mm in diameter/150mm in height. Indirect vacuuming design
Coating Size:
2 inch - 4 inch Wafer
Coater Stand:
Wheels with anchor and height adjustment
Wiring:
Back- and Bottom- Hidden
Sash:
Transparent PVC sash with full-length vertical adjustment; effective protection from inhalation of hazardous vapors such as acidic gas
Ventilation:
Back-end ventilation system with upward-airway piping (8-inches pipe width x 1 Damper).
Lighting:
Top 20W florescent light within equipment
Rotary Scheme:
Japan SANYO DENKI or MITSUBISHI AC Servo Motor with Indirect Lever Design.
RPM setting:
3 to 7 level of speed according to customer's need
setup:
Digital input.
input:
Chinese human-machine interface with color screen for direct input
Operating System:
PLC/PC Base/PAC.
Memory Preset:
10 memory settings according to customer's needs
Emergency Shut-Off:
Yes (E.M.O switch)
Power:
3 x 220V 20A
Operation parameter:
Openly modifiable
Vacuum Sensor:
Vacuum SENSOR.
Safety Feature:
Leakage Circuit Breaker and emergency stop button
Panel:
On/Off Vacuum Button
Options:
Center Positioning Control
Wafer Automatic Feeder
Wafer Cleaner
Robotic Arm
Weight Transducer
